In order to meet the expectations of our customers, SpeedFam's cleaner division, SpeedFam Clean System, continues to develop original equipment for varied cleaning processes. We will exhibit our latest cleaning technologies in fuel cell exhibition (FC EXPO 2009) in Tokyo.

Our lineup exhibits SpeedFam products which support up and coming demands for next generation products and services. Please be sure to visit us.

Session: 25-27 February 2009
Meeting place: Tokyo Big Sight
Booth No: FC7-34