- Corporate Headquarters
- SpeedFam Co., Ltd.
- Address : 4-2-37 Ogami Ayase Kanagawa 252-1104 Japan
- Tel : +81-467-76-3131 Fax : +81-467-77-7159
- E-mail : sfinfo@speedfam.com
- Polisher Manufacturing Division
- SpeedFam Nagano Co., Ltd.
- Address : 553-12 Seto Saku Nagano 385-0035 Japan
- Cleaner Division
- SpeedFam Clean System Co., Ltd.
- Address : 4-2-37 Ogami Ayase Kanagawa 252-1104 Japan
- Tel : +81-467-76-2721 Fax : +81-467-77-2020
- Laser Division
- SpeedFam Clean System Co., Ltd.
- Address : 4-2-37 Ogami Ayase Kanagawa 252-1104 Japan
- Tel : +81-467-76-7872 Fax : +81-467-77-2020
- China
- SpeedFam Mechatronics (Nanjing) Ltd.
- Address : 28 Renjie Road, Jiangning, Nanjing 211111, P.R.C.
- Tel : +86-25-5210-2687-500 Fax : +86-25-5210-2087
- E-mail : chinainfo@speedfam.com.cn
- Europe
- Melchiorre S.r.l.
- Address : Via Raffaello Sanzio 58, 20021 Bollate (MI), Italy
- Tel : +39-02-66-046-522 Fax : +39-02-66-040-111
- E-mail : info@melchiorre.net
- India
- SpeedFam (India) Pvt. Ltd.
- Address : B-87 Addl. MIDC, Anand Nagar, Ambernath (East), Thane 421506, Maharashtra, India
- Tel : +91-251-262-0403 Fax : +91-251-262-0406
- E-mail : praful@speedfam.co.in
- Korea
- SpeedFam Korea Ltd.
- Address : 50 Dolmugae-Gil, Gwacheon, Gyeonggi Province 13820, Korea
- Tel : +82-2-503-3888 Fax : +82-2-503-2662
- E-mail : speedfam@speedfam.co.kr
- Singapore
- SpeedFam Co., Ltd.
- Address : 5E Gambas Crescent, Nordcom I, Singapore 757041, Singapore
- Tel : +65-6561-7997 Fax : +65-6555-9201
- E-mail : enquiry@speedfam.com.sg
- Taiwan
- SpeedFam Inc.
- Address : 56 Kuang-Fu South Road, Fu-kou, Hsin Chu, Taiwan R.O.C.
- Tel : +886-3-5983411 Fax : +886-3-5981488
- E-mail : service@speedfam.com.tw
- U.S.A.
- SpeedFam Corp.
- Address : 1544 Barclay Blvd., Buffalo Grove, IL 60089, U.S.A.
- Tel : +1-847-499-3400 Fax : +1-847-499-3401
- E-mail : service@sfamusa.com